文章基本信息

标题：Unsupervised Semiconductor chamber matching based on shape comparison
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作者：Julien Marino ; Francesco Rossi ; Mustapha Ouladsine 等
期刊名称：IFAC PapersOnLine
印刷版ISSN：2405-8963
出版年度：2017
卷号：50
期号：1
页码：3905-3910
DOI：10.1016/j.ifacol.2017.08.363
语种：English
出版社：Elsevier
摘要：AbstractWe present a new chamber matching algorithm, which is completely data-driven and unsupervised, and designed for the semiconductor industry. The behavior of an equipment is classified as different when the shape of the time series given by one of the sensors is significantly different. Shape comparison is performed using linear regression, that authorizes both offset and change of scale.The method detects both the chamber and the sensor in which the fault is present, then helping in activating corrective maintenances. Application results are shown with two examples of real semiconductor industrial failures.
关键词：Keywordsstatistical monitoringsemiconductor processchamber matchingunsupervised classificationshape comparison